@misc{indiciae6a07681277af, title = {Mitigating parasitic contributions in measured piezoresponse for accurate determination of piezoelectric coefficients in Sc-alloyed-AlN thin films using piezo-response force microscopy}, author = {Ch Kishan Singh and K. Rajalakshmi and N. Balamurugan and Rakesh kumar and Mukul Gupta and R. Ramaseshan and Kiran Baraik}, year = {2025}, url = {https://arxiv.org/abs/2505.03190}, note = {Source identifier: 2505.03190} }