TY  - RPRT
TI  - Mitigating parasitic contributions in measured piezoresponse for accurate determination of piezoelectric coefficients in Sc-alloyed-AlN thin films using piezo-response force microscopy
AU  - Ch Kishan Singh
AU  - K. Rajalakshmi
AU  - N. Balamurugan
AU  - Rakesh kumar
AU  - Mukul Gupta
AU  - R. Ramaseshan
AU  - Kiran Baraik
PY  - 2025
UR  - https://arxiv.org/abs/2505.03190
ID  - 2505.03190
ER  -