@misc{indiciaef812764d022d,
  title = {Growth Mechanisms and Mechanical Response of 3D Superstructured Cubic and Hexagonal Hf\$\_\{1-x\}\$Al\$\_x\$N Thin Films},
  author = {M. Lorentzon and N. Takata and D. Depla and T. Zhu and G. Greczynski and R. Hahn and A. Zubayer and J. Palisaitis and H. Riedl and D. Kim and L. Hultman and J. Birch and N. Ghafoor},
  year = {2025},
  url = {https://arxiv.org/abs/2505.03606},
  note = {Source identifier: 2505.03606}
}