@misc{indiciae42230a1192ca,
  title = {Direct integration of atomic precision advanced manufacturing into middle-of-line silicon fabrication},
  author = {E. M. Anderson and C. R. Allemang and A. J. Leenheer and S. W. Schmucker and J. A. Ivie and D. M. Campbell and W. Lepkowski and X. Gao and P. Lu and C. Arose and T. -M. Lu and C. Halsey and T. D. England and D. R. Ward and D. A. Scrymgeour and S. Misra},
  year = {2025},
  doi = {10.1063/5.0278639},
  url = {https://arxiv.org/abs/2505.03622},
  note = {Source identifier: 2505.03622}
}