@misc{indiciaefe23c889e61a,
  title = {Accelerating the development of oxynitride thin films: A combinatorial investigation of the Al-Si-O-N system},
  author = {Stefanie Frick and Oleksandr Pshyk and Arnold Müller and Alexander Wieczorek and Kerstin Thorwarth and Sebastian Siol},
  year = {2025},
  url = {https://arxiv.org/abs/2505.03635},
  note = {Source identifier: 2505.03635}
}