TY  - RPRT
TI  - Accelerating the development of oxynitride thin films: A combinatorial investigation of the Al-Si-O-N system
AU  - Stefanie Frick
AU  - Oleksandr Pshyk
AU  - Arnold Müller
AU  - Alexander Wieczorek
AU  - Kerstin Thorwarth
AU  - Sebastian Siol
PY  - 2025
UR  - https://arxiv.org/abs/2505.03635
ID  - 2505.03635
ER  -