@misc{indiciae84b5b334ca1f,
  title = {Nanoscale Mechanical Structures Fabricated from Silicon-on-Insulator Substrates},
  author = {Andrew N. Cleland and Michael L. Roukes},
  year = {2025},
  url = {https://arxiv.org/abs/2505.04574},
  note = {Source identifier: 2505.04574}
}