@misc{indiciaef3b5b45e93cf,
  title = {Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators},
  author = {Mengxin Lin and Zihan Li and Alexander Kotz and Hugo Larocque and Johann Riemensberger and Christian Koos and Tobias J. Kippenberg},
  year = {2025},
  url = {https://arxiv.org/abs/2505.04755},
  note = {Source identifier: 2505.04755}
}