@misc{indiciae17dcf0b48658,
  title = {Advanced 3D Imaging Approach to TSV/TGV Metrology and Inspection Using Only Optical Microscopy},
  author = {Gugeong Sung},
  year = {2025},
  url = {https://arxiv.org/abs/2505.04913},
  note = {Source identifier: 2505.04913}
}