@misc{indiciae0f4334d1dbd1, title = {Modeling PFAS in Semiconductor Manufacturing to Quantify Trade-offs in Energy Efficiency and Environmental Impact of Computing Systems}, author = {Mariam Elgamal and Abdulrahman Mahmoud and Gu-Yeon Wei and David Brooks and Gage Hills}, year = {2025}, url = {https://arxiv.org/abs/2505.06727}, note = {Source identifier: 2505.06727} }