TY - RPRT TI - Modeling PFAS in Semiconductor Manufacturing to Quantify Trade-offs in Energy Efficiency and Environmental Impact of Computing Systems AU - Mariam Elgamal AU - Abdulrahman Mahmoud AU - Gu-Yeon Wei AU - David Brooks AU - Gage Hills PY - 2025 UR - https://arxiv.org/abs/2505.06727 ID - 2505.06727 ER -