TY  - RPRT
TI  - Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films
AU  - Luc Pichon
AU  - A. Straboni
AU  - T. Girardeau
AU  - M. Drouet
AU  - P. Widmayer
PY  - 2025
UR  - https://arxiv.org/abs/2505.07316
ID  - 2505.07316
ER  -