@misc{indiciae3731d42487df,
  title = {Unraveling the Reaction Mechanisms in a Chemically Amplified EUV Photoresist from a Combined Theoretical and Experimental Approach},
  author = {Laura Galleni and Dhirendra P. Singh and Thierry Conard and Geoffrey Pourtois and Paul van der Heide and John Petersen and Kevin M. Dorney and Michiel J. van Setten},
  year = {2025},
  doi = {10.1117/12.3051002},
  url = {https://arxiv.org/abs/2505.07346},
  note = {Source identifier: 2505.07346}
}