TY  - RPRT
TI  - Unraveling the Reaction Mechanisms in a Chemically Amplified EUV Photoresist from a Combined Theoretical and Experimental Approach
AU  - Laura Galleni
AU  - Dhirendra P. Singh
AU  - Thierry Conard
AU  - Geoffrey Pourtois
AU  - Paul van der Heide
AU  - John Petersen
AU  - Kevin M. Dorney
AU  - Michiel J. van Setten
PY  - 2025
DO  - 10.1117/12.3051002
UR  - https://arxiv.org/abs/2505.07346
ID  - 2505.07346
ER  -