@misc{indiciae9be6965677c0,
  title = {Production-ready double-side fabrication of dual-band infrared meta-optics using deep-UV lithography},
  author = {Kai Sun and Xingzhao Yan and Jordan Scott and Jun-Yu Ou and James N. Monks and Otto L. Muskens},
  year = {2025},
  doi = {10.1021/acsnano.5c11908},
  url = {https://arxiv.org/abs/2505.09488},
  note = {Source identifier: 2505.09488}
}