@misc{indiciaed7f76409423c,
  title = {Defect Detection in Photolithographic Patterns Using Deep Learning Models Trained on Synthetic Data},
  author = {Prashant P. Shinde and Priyadarshini P. Pai and Shashishekar P. Adiga and K. Subramanya Mayya and Yongbeom Seo and Myungsoo Hwang and Heeyoung Go and Changmin Park},
  year = {2025},
  url = {https://arxiv.org/abs/2505.10192},
  note = {Source identifier: 2505.10192}
}