TY  - RPRT
TI  - Defect Detection in Photolithographic Patterns Using Deep Learning Models Trained on Synthetic Data
AU  - Prashant P. Shinde
AU  - Priyadarshini P. Pai
AU  - Shashishekar P. Adiga
AU  - K. Subramanya Mayya
AU  - Yongbeom Seo
AU  - Myungsoo Hwang
AU  - Heeyoung Go
AU  - Changmin Park
PY  - 2025
UR  - https://arxiv.org/abs/2505.10192
ID  - 2505.10192
ER  -