@misc{indiciaec3b419ee7dc8,
  title = {Low-loss Sb\$\_2\$S\$\_3\$ Optical Phase Shifter Enabled by Optimizing Sputtering Conditions},
  author = {Yuto Miyatake and Tomohiro Anda and Yosuke Wakita and Kotaro Makino and Shogo Hatayama and Makoto Okano and Kasidit Toprasertpong and Shinichi Takagi and Mitsuru Takenaka},
  year = {2025},
  url = {https://arxiv.org/abs/2505.10752},
  note = {Source identifier: 2505.10752}
}