TY  - RPRT
TI  - Auger parameter analysis for TiN and AlN thin films via combined in-situ XPS and HAXPES
AU  - O. V. Pshyk
AU  - J. Patidar
AU  - C. Cancellieri
AU  - S. Siol
PY  - 2025
UR  - https://arxiv.org/abs/2505.20145
ID  - 2505.20145
ER  -