@misc{indiciae1ea0a47e7f2b,
  title = {2D PZT MEMS Resonant Scanner Using a Three-Mask Process},
  author = {Mehrdad Khodapanahandeh and Parviz Zolfaghari and Hakan Urey},
  year = {2025},
  url = {https://arxiv.org/abs/2505.24566},
  note = {Source identifier: 2505.24566}
}