TY  - RPRT
TI  - 2D PZT MEMS Resonant Scanner Using a Three-Mask Process
AU  - Mehrdad Khodapanahandeh
AU  - Parviz Zolfaghari
AU  - Hakan Urey
PY  - 2025
UR  - https://arxiv.org/abs/2505.24566
ID  - 2505.24566
ER  -