TY - RPRT TI - Self-ion implantation and structural relaxation in amorphous silicon AU - J. M. Gibson AU - Robe Elliman AU - T. Susi AU - C. Mangler PY - 2025 DO - 10.1063/5.0282943 UR - https://arxiv.org/abs/2506.00176 ID - 2506.00176 ER -