@misc{indiciaed7ccd71744ed,
  title = {Semiconductor SEM Image Defect Classification Using Supervised and Semi-Supervised Learning with Vision Transformers},
  author = {Chien-Fu and Huang and Katherine Sieg and Leonid Karlinksy and Nash Flores and Rebekah Sheraw and Xin Zhang},
  year = {2025},
  doi = {10.1109/asmc64512.2025.11010396},
  url = {https://arxiv.org/abs/2506.03345},
  note = {Source identifier: 2506.03345}
}