@misc{indiciae2e10598564aa, title = {Machine learning for in-situ composition mapping in a self-driving magnetron sputtering system}, author = {Sanna Jarl and Jens Sjölund and Robert J. W. Frost and Anders Holst and Jonathan J. S. Scragg}, year = {2026}, url = {https://arxiv.org/abs/2506.05999}, note = {Source identifier: 2506.05999} }