TY  - RPRT
TI  - Machine learning for in-situ composition mapping in a self-driving magnetron sputtering system
AU  - Sanna Jarl
AU  - Jens Sjölund
AU  - Robert J. W. Frost
AU  - Anders Holst
AU  - Jonathan J. S. Scragg
PY  - 2026
UR  - https://arxiv.org/abs/2506.05999
ID  - 2506.05999
ER  -