@misc{indiciae76773ce0af0d,
  title = {Surrogate models to optimize plasma assisted atomic layer deposition in high aspect ratio features},
  author = {Angel Yanguas-Gil and Jeffrey W. Elam},
  year = {2025},
  url = {https://arxiv.org/abs/2506.09313},
  note = {Source identifier: 2506.09313}
}