@misc{indiciaeff96a1d0cb3e, title = {Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)}, author = {Indrani Bhattacharya and Marcus Petz and Rainer Tutsch}, year = {2025}, url = {https://arxiv.org/abs/2506.10602}, note = {Source identifier: 2506.10602} }