@misc{indiciae4125e6223491, title = {Revisiting Fourier-Based Reflection Spectrum Measurement in Coherence Scanning Interferometry}, author = {Cheng Chen and Sotero Ordones and Jeremy Coupland and Rong Su}, year = {2025}, url = {https://arxiv.org/abs/2506.12866}, note = {Source identifier: 2506.12866} }