TY  - RPRT
TI  - Revisiting Fourier-Based Reflection Spectrum Measurement in Coherence Scanning Interferometry
AU  - Cheng Chen
AU  - Sotero Ordones
AU  - Jeremy Coupland
AU  - Rong Su
PY  - 2025
UR  - https://arxiv.org/abs/2506.12866
ID  - 2506.12866
ER  -