@misc{indiciaef8c80964ca56,
  title = {High yield, low disorder Si/SiGe heterostructures for spin qubit devices manufactured in a BiCMOS pilot line},
  author = {Alberto Mistroni and Marco Lisker and Yuji Yamamoto and Wei-Chen Wen and Fabian Fidorra and Henriette Tetzner and Laura K. Diebel and Lino Visser and Spandan Anupam and Vincent Mourik and Lars R. Schreiber and Hendrik Bluhm and Dominique Bougeard and Marvin H. Zoellner and Giovanni Capellini and Felix Reichmann},
  year = {2025},
  url = {https://arxiv.org/abs/2506.14660},
  note = {Source identifier: 2506.14660}
}