@misc{indiciaea0ce158a054f,
  title = {Simultaneous Charge Carrier Density Mapping of SiC Epilayers and Substrates with Terahertz Time-Domain Spectroscopy},
  author = {Joshua Hennig and Jens Klier and Stefan Duran and Kuei-Shen Hsu and Jan Beyer and Christian Roeder and Franziska C. Beyer and Nadine Schueler and Nico Vieweg and Katja Dutzi and Georg von Freymann and Daniel Molter},
  year = {2025},
  url = {https://arxiv.org/abs/2506.14945},
  note = {Source identifier: 2506.14945}
}