@misc{indiciae3e22c5cfc070,
  title = {Intelligent Assistants for the Semiconductor Failure Analysis with LLM-Based Planning Agents},
  author = {Aline Dobrovsky and Konstantin Schekotihin and Christian Burmer},
  year = {2025},
  url = {https://arxiv.org/abs/2506.15567},
  note = {Source identifier: 2506.15567}
}