@misc{indiciae96f51d0c5bd7,
  title = {Improving the lifetime of aluminum-based superconducting qubits through atomic layer etching and deposition},
  author = {Neha Mahuli and Joaquin Minguzzi and Jiansong Gao and Rachel Resnick and Sandra Diez and Cosmic Raj and Guillaume Marcaud and Matthew Hunt and Loren Swenson and Jefferson Rose and Oskar Painter and Ignace Jarrige},
  year = {2026},
  url = {https://arxiv.org/abs/2506.17474},
  note = {Source identifier: 2506.17474}
}