@misc{indiciae700ebbfa08a0,
  title = {LPCVD based Plasma Damage Free in situ etching of \$β\$-Ga\$\_2\$O\$\_3\$ using Solid Source Gallium},
  author = {Saleh Ahmed Khan and Ahmed Ibreljic and A F M Anhar Uddin Bhuiyan},
  year = {2025},
  doi = {10.1063/5.0277909},
  url = {https://arxiv.org/abs/2506.17855},
  note = {Source identifier: 2506.17855}
}