TY  - RPRT
TI  - LPCVD based Plasma Damage Free in situ etching of $β$-Ga$_2$O$_3$ using Solid Source Gallium
AU  - Saleh Ahmed Khan
AU  - Ahmed Ibreljic
AU  - A F M Anhar Uddin Bhuiyan
PY  - 2025
DO  - 10.1063/5.0277909
UR  - https://arxiv.org/abs/2506.17855
ID  - 2506.17855
ER  -