@misc{indiciae63d0fd9e10f5,
  title = {Stochastic dynamics simulation of the focused electron beam induced deposition process},
  author = {Ilia A. Solov'yov and Alexey Prosvetov and Gennady Sushko and Andrey V. Solov'yov},
  year = {2025},
  url = {https://arxiv.org/abs/2506.18163},
  note = {Source identifier: 2506.18163}
}