TY  - RPRT
TI  - Stochastic dynamics simulation of the focused electron beam induced deposition process
AU  - Ilia A. Solov'yov
AU  - Alexey Prosvetov
AU  - Gennady Sushko
AU  - Andrey V. Solov'yov
PY  - 2025
UR  - https://arxiv.org/abs/2506.18163
ID  - 2506.18163
ER  -