@misc{indiciaec423cd0f29ce,
  title = {Measurements, simulations, and models of the point-spread function of electron-beam lithography},
  author = {Nikolaj B. Hougs and Kristian S. Knudsen and Marcus Albrechtsen and Taichi Suhara and Christian A. Rosiek and Søren Stobbe},
  year = {2026},
  url = {https://arxiv.org/abs/2506.21236},
  note = {Source identifier: 2506.21236}
}