TY  - RPRT
TI  - Measurements, simulations, and models of the point-spread function of electron-beam lithography
AU  - Nikolaj B. Hougs
AU  - Kristian S. Knudsen
AU  - Marcus Albrechtsen
AU  - Taichi Suhara
AU  - Christian A. Rosiek
AU  - Søren Stobbe
PY  - 2026
UR  - https://arxiv.org/abs/2506.21236
ID  - 2506.21236
ER  -