@misc{indiciae2c71b623bd85,
  title = {Simplified Aluminum Nitride Processing for Low-Loss Integrated Photonics and Nonlinear Optics},
  author = {Haochen Yan and Shuangyou Zhang and Arghadeep Pal and Alekhya Gosh and Abdullah Alabbadi and Masoud Kheyri and Toby Bi and Yaojing Zhang and Irina Harder and Olga Lohse and Florentina Gannott and Alexander Gumann and Eduard Butzen and Katrin Ludwig and Pascal DelHaye},
  year = {2025},
  url = {https://arxiv.org/abs/2506.22595},
  note = {Source identifier: 2506.22595}
}