@misc{indiciae7acc58003a96, title = {Development of an Atomic Layer Deposition System for Deposition of Alumina as a Hydrogen Permeation Barrier}, author = {Zachary R. Robinson and Jeffrey Woodward and Alexander C. Kozen and Joshua Ruby and Tyler Liao and Luke Herter and Rashad Ahmadov and Mark D. Wittman and Matthew Sharpe}, year = {2025}, url = {https://arxiv.org/abs/2507.00958}, note = {Source identifier: 2507.00958} }