@misc{indiciae970179adda60,
  title = {The impact of process steps on nearly ideal subthreshold slope in 300-mm compatible InGaZnO TFT},
  author = {Hongwei Tang and Dennis Lin and Subhali Subhechha and Adrian Chasin and Daisuke Matsubayashi and Michiel van Setten and Yiqun Wan and Harold Dekkers and Jie Li and Shruthi Subramanian and Zhuo Chen and Nouredine Rassoul and Yuchao Jiang and Jan Van Houdt and Valeri Afanas`ev and Gouri Sankar Kar and Attilio Belmonte},
  year = {2025},
  doi = {10.1109/led.2025.3549865},
  url = {https://arxiv.org/abs/2507.01901},
  note = {Source identifier: 2507.01901}
}