@misc{indiciae0967e02d737b,
  title = {Physics-informed neural networks and neural operators for a study of EUV electromagnetic wave diffraction from a lithography mask},
  author = {Vasiliy A. Es'kin and Egor V. Ivanov},
  year = {2025},
  url = {https://arxiv.org/abs/2507.04153},
  note = {Source identifier: 2507.04153}
}