TY  - RPRT
TI  - Physics-informed neural networks and neural operators for a study of EUV electromagnetic wave diffraction from a lithography mask
AU  - Vasiliy A. Es'kin
AU  - Egor V. Ivanov
PY  - 2025
UR  - https://arxiv.org/abs/2507.04153
ID  - 2507.04153
ER  -