@misc{indiciaef63f65dbf469, title = {Quasi-Vertical \$β\$-Ga\$\_2\$O\$\_3\$ Schottky Diodes on Sapphire Using All-LPCVD Growth and Plasma-Free Ga-Assisted Etching}, author = {Saleh Ahmed Khan and Ahmed Ibreljic and A F M Anhar Uddin Bhuiyan}, year = {2025}, doi = {10.1063/5.0280191}, url = {https://arxiv.org/abs/2507.06353}, note = {Source identifier: 2507.06353} }