TY  - RPRT
TI  - 3D Atomic-Scale Metrology of Strain Relaxation and Roughness in Gate-All-Around (GAA) Transistors via Electron Ptychography
AU  - Shake Karapetyan
AU  - Steven E. Zeltmann
AU  - Glen Wilk
AU  - Ta-Kun Chen
AU  - Vincent D. -H. Hou
AU  - David A. Muller
PY  - 2025
DO  - 10.1038/s41467-026-69733-1
UR  - https://arxiv.org/abs/2507.07265
ID  - 2507.07265
ER  -