@misc{indiciaee9fc4915ce40,
  title = {Monolithic interferometric modules for multi-axis coordinate positioning with sub-nanometre precision},
  author = {Simon Rerucha and Ondrej Cip and Miroslava Hola and Josef Lazar and Bretislav Mikel},
  year = {2025},
  url = {https://arxiv.org/abs/2507.07642},
  note = {Source identifier: 2507.07642}
}