TY  - RPRT
TI  - Monolithic interferometric modules for multi-axis coordinate positioning with sub-nanometre precision
AU  - Simon Rerucha
AU  - Ondrej Cip
AU  - Miroslava Hola
AU  - Josef Lazar
AU  - Bretislav Mikel
PY  - 2025
UR  - https://arxiv.org/abs/2507.07642
ID  - 2507.07642
ER  -