@misc{indiciae2ac0d5c60551,
  title = {On-chip stencil lithography for superconducting qubits},
  author = {Roudy Hanna and Sören Ihssen and Simon Geisert and Umut Kocak and Matteo Arfini and Albert Hertel and Thomas J. Smart and Michael Schleenvoigt and Tobias Schmitt and Joscha Domnick and Kaycee Underwood and Abdur Rehman Jalil and Jin Hee Bae and Benjamin Bennemann and Mathieu Féchant and Mitchell Field and Martin Spiecker and Nicolas Zapata and Christian Dickel and Erwin Berenschot and Niels Tas and Gary A. Steele and Detlev Grützmacher and Ioan M. Pop and Peter Schüffelgen},
  year = {2025},
  doi = {10.1063/5.0307532},
  url = {https://arxiv.org/abs/2507.17005},
  note = {Source identifier: 2507.17005}
}