@misc{indiciae46b76fcdce79, title = {Exploring Active Learning for Semiconductor Defect Segmentation}, author = {Lile Cai and Ramanpreet Singh Pahwa and Xun Xu and Jie Wang and Richard Chang and Lining Zhang and Chuan-Sheng Foo}, year = {2025}, doi = {10.1109/icip46576.2022.9897842}, url = {https://arxiv.org/abs/2507.17359}, note = {Source identifier: 2507.17359} }